High-voltage analytical electron microscopy
Conference
·
OSTI ID:5960944
The use of analytical and high-voltage electron microscopies (AEM, HVEM) for microcharacterization is now well established as a powerful tool in both basic and applied materials research. There are, however, several fundamental limitations in the use of analytical electron microscopy in lower voltage instruments (100 to 200 kV) which restricts microanalysis - most notably multiple scattering. As a result of this, there is sufficient motivation to explore the merits of AEM-type microanalysis in the HVEM regime. This paper will discuss aspects of both qualitative and quantitative analysis at higher voltages, as well as the plans for upgrading the ANL 1.2 MeV HVEM (EM-7) for x-ray and electron-energy-loss spectroscopies (XEDS, EELS).
- Research Organization:
- Argonne National Lab., IL (USA)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 5960944
- Report Number(s):
- CONF-830819-3; ON: DE83014318
- Country of Publication:
- United States
- Language:
- English
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