A miniature high-power KrF laser excited with a capacitively coupled discharge
Journal Article
·
· IEEE J. Quant. Electron.; (United States)
A KrF excimer laser excited in a capacitively coupled discharge device made out of commercial BaTiO/sub 3/ doorknob capacitors is described. The discharge volume of 1.4 cm/sup 3/ is formed by a 3 mm bore into four capacitors glued together in a line. A maximal laser output energy of 1.7 mJ (1.2 J/1) in a 5.0 ns long pulse was achieved.
- Research Organization:
- Department of Applied Physics, Twente University of Technology, Enschede
- OSTI ID:
- 5952329
- Journal Information:
- IEEE J. Quant. Electron.; (United States), Journal Name: IEEE J. Quant. Electron.; (United States) Vol. QE-21:3; ISSN IEJQA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CAPACITORS
CHARGE-COUPLED DEVICES
DESIGN
ELECTRIC DISCHARGES
ELECTRICAL EQUIPMENT
ELECTRICAL PUMPING
ENERGY SPECTRA
EQUIPMENT
EXCIMER LASERS
FABRICATION
FLUORIDES
FLUORINE COMPOUNDS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
KRYPTON COMPOUNDS
KRYPTON FLUORIDES
LASERS
OXYGEN COMPOUNDS
PERFORMANCE
PULSES
PUMPING
RARE GAS COMPOUNDS
SEMICONDUCTOR DEVICES
SIZE
SPECTRA
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
420300* -- Engineering-- Lasers-- (-1989)
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CAPACITORS
CHARGE-COUPLED DEVICES
DESIGN
ELECTRIC DISCHARGES
ELECTRICAL EQUIPMENT
ELECTRICAL PUMPING
ENERGY SPECTRA
EQUIPMENT
EXCIMER LASERS
FABRICATION
FLUORIDES
FLUORINE COMPOUNDS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
KRYPTON COMPOUNDS
KRYPTON FLUORIDES
LASERS
OXYGEN COMPOUNDS
PERFORMANCE
PULSES
PUMPING
RARE GAS COMPOUNDS
SEMICONDUCTOR DEVICES
SIZE
SPECTRA
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS