Microtechnology

Technical Report · Sat Feb 01 00:00:00 EST 1997

DOI:https://doi.org/10.2172/595227· OSTI ID:595227

Mariella, R P

Research reported in the thrust area of microtechnology includes: advanced plasma etch processes for high-aspect-ratio, submicron-feature-size applications; integration of PCR amplification and capillary electrophoresis in a DNA analysis device; microactuators for optical interferometry; thin silicon windows; eutectic bonding and fusion bonding; solid-source MBE-grown GaAs/AlGaAs ridge-waveguide semiconductor optical amplifiers; large area lithography; phase-shift lithography; thermally robust optical semiconductor devices using AlGaInAs grown by molecular beam epitaxy; and porous silicon formation and characterization.

• Research Organization: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 595227
• Report Number(s): UCRL-ID-125472; ON: DE98050271
• Resource Relation: Other Information: PBD: 1 Feb 1997
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES
LAWRENCE LIVERMORE NATIONAL LABORATORY
RESEARCH PROGRAMS
ETCHING
DNA
CHEMICAL ANALYSIS
ACTUATORS
THIN FILMS
BONDING
WAVEGUIDES
MOLECULAR BEAM EPITAXY