Fast, self-nulling spectroscopic ellipsometer: instrumentation and application
Technical Report
·
OSTI ID:5915877
The advantages of rapid spectral scanning have been combined with the inherent accuracy of a compensating ellipsometer operated in the polarizer-compensator-sample-analyzer configuration. Wavelength is varied over the visible-uv (370-720 nm) at a maximum rate of 114 nm/s by rotating a continuously-variable interference filter. A three-reflection Fresnel rhomb serves as the achromatic quarter-wave compensator. A microcomputer is used to collect spectroscopic measurements, perform instrument calibrations, digital filtering and interpret data. Wavelength-independent parameters of multiple-film optical models have been determined by treating measurements of delta and psi at different wavelengths as independent measurements. Experimental and predicted ellipsometer measurements are compared by use of statistical techniques for the determination of optimum values and confidence limits of model parameters.
- Research Organization:
- Lawrence Berkeley Lab., CA (USA)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 5915877
- Report Number(s):
- LBL-15918; ON: DE83015015
- Country of Publication:
- United States
- Language:
- English
Similar Records
Fast, self-nulling spectroscopic ellipsometer: instrumentation and application. Revision
Fast, self-compensating spectral-scanning ellipsometer
Corrections for component imperfections and azimuth errors in an automatic self-compensating ellipsometer
Conference
·
Sun May 01 00:00:00 EDT 1983
·
OSTI ID:5605361
Fast, self-compensating spectral-scanning ellipsometer
Journal Article
·
Wed Feb 29 23:00:00 EST 1984
· Rev. Sci. Instrum.; (United States)
·
OSTI ID:5219540
Corrections for component imperfections and azimuth errors in an automatic self-compensating ellipsometer
Technical Report
·
Tue Aug 01 00:00:00 EDT 1978
·
OSTI ID:6512483