Gas sensing with surface acoustic wave devices
Conference
·
OSTI ID:5908912
The use of a ZnO-on-Si surface acoustic wave (SAW) resonator as a gas sensor is discussed. In particular, the sensitivity of the device to organic vapors is examined. The planar nature of the SAW device, in which the acoustic energy is confined to within roughly one acoustic wavelength of the surface, makes the device extremely sensitive to surface perturbations. This characteristic has been exploited in the construction of SAW gas sensors in which the surface wave propagation characteristics are altered by species adsorbed from the ambient gas. The porous nature of the sputtered ZnO film, in conjunction with the microbalance capability of the SAW device, gives the sensor the ability to distinguish molecules on the basis of both size and mass. (LEW)
- Research Organization:
- Sandia National Labs., Albuquerque, NM (USA)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 5908912
- Report Number(s):
- SAND-84-2436C; CONF-850685-2; ON: DE85009125
- Country of Publication:
- United States
- Language:
- English
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