Formation of thin superconducting films by the laser processing method

Journal Article · Mon Nov 30 04:00:00 EST 1987 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.98489· OSTI ID:5905290

Narayan, J; Biunno, N; Singh, R; Holland, O W; Auciello, O

We have prepared thin films of Y-Ba-Cu-O superconductors using a pulsed laser evaporation technique. Thin films were formed on (100) Si, (100) MgO, (1-bar102) sapphire, (100) SrTiO/sub 3/, and amorphous SiO/sub 2/ substrates using a XeCl excimer laser (lambda = 0.308 ..mu..m, tau = 45 x 10/sup -9/ s). The depositions were done in an ultrahigh vacuum chamber with pressure of about 10/sup -6/ Torr during thin-film formation. The deposition by pulsed nanosecond laser irradiation results in stoichiometry close to that of the target. The thickness of the film was controlled by varying the pulse energy density and the number of pulses. The substrate temperature was kept at 470 /sup 0/C during deposition. Subsequent annealing treatments were carried out at 900 and 650 /sup 0/C in oxygen atmosphere to recover the superconducting properties of these thin films. The resistance of these films was measured as a function of temperature using the four-point probe method. These thin films were analyzed using cross-section transmission electron microscopy, Rutherford backscattering spectrometry, and channeling techniques. The variation in the oxygen content and the interdiffusion of species into the substrate during subsequent annealing treatments are discussed.

• Research Organization: Materials Science and Engineering Department, North Carolina State University, Raleigh, North Carolina 27695-7916
• OSTI ID: 5905290
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 51:22; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
ANNEALING
BACKSCATTERING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHANNELING
CHEMICAL COMPOSITION
CHLORIDES
CHLORINE COMPOUNDS
COATINGS
COPPER
COPPER COMPOUNDS
COPPER OXIDES
CORUNDUM
CRYSTAL STRUCTURE
DATA
DEPOSITION
DIFFUSION
DIMENSIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON MICROSCOPY
ELEMENTS
EVAPORATION
EXCIMER LASERS
EXPERIMENTAL DATA
FABRICATION
FILMS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
HEAT TREATMENTS
HEATING
HIGH TEMPERATURE
INFORMATION
ION CHANNELING
LASER-RADIATION HEATING
LASERS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
METALS
MICROSCOPY
MICROSTRUCTURE
MINERALS
NUMERICAL DATA
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
PLASMA HEATING
RARE GAS COMPOUNDS
SAPPHIRE
SCATTERING
SEMIMETALS
SILICA
SILICON
SILICON COMPOUNDS
SILICON OXIDES
STOICHIOMETRY
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SURFACE COATING
THICKNESS
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY
ULTRAHIGH VACUUM
VACUUM COATING
VAPOR DEPOSITED COATINGS
VERY HIGH TEMPERATURE
XENON CHLORIDES
XENON COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES