Absolute thermal expansion measurements of single-crystal silicon in the range 300-1,300 K with an interferometric dilatometer
The thermal expansion coefficient of single-crystal silicon has been measured in the range 300-1300 K using an interferometric dilatometer. The measurement system consists of a double-path optical heterodyne interferometer and a radiant image furnace with a quartz vacuum tube, which provides both accuracy and rapidity of measurement. The uncertainties in length and temperature determination are within 4 nm and 0.4 K, respectively. A high-purity dislocation-free FZ silicon single crystal was used in the study. Thermal expansion coefficients of silicon oriented in the (111) direction have been determined over the temperature range from 300 to 1300 K. The standard deviation of the measurement data from the best fitting for the fifth-order polynominal in temperature is 2.1 /times/ 10/sup /minus/8/ K/sup /minus/1/. The present value for the thermal expansion coefficient agrees with 9 /times/ 10/sup /minus/8/ K/sup /minus/1/ with the interferometric measurement of polycrystalline pure silicon by Roberts (1981) between 300 and 800 K and within 1.2 /times/ 10/sup /minus/7/ K/sup /minus/1/ with the single-crystal diffractometric measurement by Okada and Tokumaru (1984) between 300 and 1300 K.
- Research Organization:
- National Research Lab. of Metrology, Ibaraki (Japan)
- OSTI ID:
- 5890459
- Report Number(s):
- CONF-880606-
- Journal Information:
- Int. J. Thermophys.; (United States), Vol. 9:6; Conference: 10. symposium on thermophysical properties, Gaithersburg, MD, USA, 20-23 Jun 1988
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
SILICON
THERMAL EXPANSION
ACCURACY
BEAM OPTICS
DATA COVARIANCES
DILATOMETRY
HIGH TEMPERATURE
INTERFEROMETRY
LASERS
MEDIUM TEMPERATURE
MONOCRYSTALS
POLYNOMIALS
SENSITIVITY
SPATIAL RESOLUTION
TEMPERATURE DEPENDENCE
TEMPERATURE MEASUREMENT
TEST FACILITIES
THERMAL TESTING
VERY HIGH TEMPERATURE
ZEEMAN EFFECT
CRYSTALS
ELEMENTS
EXPANSION
FUNCTIONS
MATERIALS TESTING
NONDESTRUCTIVE TESTING
RESOLUTION
SEMIMETALS
TESTING
THERMAL ANALYSIS
360104* - Metals & Alloys- Physical Properties