Ion bombardment effects on the near-surface composition during sputter profiling. [Cu-40 at. % Ni; Ni-9. 5 at. % Si]

Conference · Tue Sep 01 04:00:00 EDT 1987

OSTI ID:5848979

Lam, N Q

The alteration of the near-surface composition that has often been observed in ion-bombarded alloys and compounds results from the interplay of several processes. In addition to displacement mixing leading to a randomization of atomic locations, and preferential loss of alloying elements by sputtering, which are dominant at relatively low temperatures, many thermally-activated processes, including radiation-enhanced diffusion, radiation-induced segregation and Gibbsian adsorption, also play important roles. The relative significance of each process in the evolution of the sputtered flux composition and of the compositional profile of the target depends on the type of alloys, temperature and ion characteristics. The number of systematic investigations of alloy sputtering that consider all of these processes and their potential interactions is rather limited. Purpose of this paper is to characterize the processes in simple physical terms and to point out under what conditions they may become important for compositional changes in near-surface regions of sputter alloys. Selected results of recent model calculations and experimental studies will be presented to indicate the effects to be expected. 63 refs., 15 figs.

• Research Organization: Argonne National Lab., IL (USA)
• DOE Contract Number: W-31109-ENG-38
• OSTI ID: 5848979
• Report Number(s): CONF-8710213-1; ON: DE88003087
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360106* -- Metals & Alloys-- Radiation Effects
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ADSORPTION
ALLOYS
AUGER EFFECT
BEAMS
COLLISIONS
COPPER ALLOYS
CRYSTAL DEFECTS
CRYSTAL LATTICES
CRYSTAL STRUCTURE
DIFFUSION
DISTRIBUTION
EQUATIONS
ION BEAMS
ION COLLISIONS
KINETICS
LAYERS
NICKEL ALLOYS
NICKEL BASE ALLOYS
PHYSICAL RADIATION EFFECTS
POINT DEFECTS
RADIATION EFFECTS
REACTION KINETICS
SEGREGATION
SILICON ALLOYS
SORPTION
SPATIAL DISTRIBUTION
SPUTTERING
SURFACES
TEMPERATURE DEPENDENCE
VACANCIES