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Numerical calculations for the electron energy distribution in helium, hollow-cathode glow discharge

Journal Article · · IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States)
DOI:https://doi.org/10.1109/27.106827· OSTI ID:5827485
 [1]
  1. Dept. of Electronics and Information Science, Faculty of Engineering and Design, Kyoto Inst. of Technology, Kyoto 606 (JP)
In this paper an electron energy distribution is determined with the Monte Carlo method in a helium, hollow-cathode glow discharge. Electron-electron collisions are taken into account, as well as electron collisions with atoms. In the negative glow, a plateau-like profile is obtained in the low-energy region; the profile approximates a Maxwellian distribution in this energy range. The energy distribution decreases rapidly at about the minimum excitation energy of the atom. In the center of the negative glow, the low-energy electrons are five orders of magnitude as many as the high-energy electrons, which have enough energy to excite or ionize atoms.
OSTI ID:
5827485
Journal Information:
IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States), Journal Name: IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States) Vol. 19:2; ISSN ITPSB; ISSN 0093-3813
Country of Publication:
United States
Language:
English