/ital In/ /ital situ/ dc oxygen-discharge cleaning system for optical elements

Journal Article · Sat Jul 01 00:00:00 EDT 1989 · Rev. Sci. Instrum.; (United States)

DOI:https://doi.org/10.1063/1.1140869· OSTI ID:5819225

Koide, T; Shidara, T; Tanaka, K; Yagishita, A; Sato, S

/ital In/ /ital situ/ dc oxygen-discharge cleaning arrangements have been developed at the Photon Factory for the removal of carbon contamination from optical surfaces. A high cleaning rate could be achieved by producing an oxygen plasma close to the optical elements with special care taken to avoid any harmful effects from the discharge; contaminant carbon was completely removed within a few hours, at most. This short exposure time and the use of dry oxygen gas resulted in a restoration of the original ultrahigh vacuum without a bakeout. Results with a Seya-Namioka beamline for gas-phase experiments showed a flux enhancement amounting to a factor of 50, and results with a grasshopper beamline showed a nearly complete recovery of the light intensity, even at the carbon /ital K/ edge.

• Research Organization: Photon Factory, National Laboratory for High Energy Physics, 1-1 Oho, Tsukuba-shi, Ibaraki-ken 305, Japan (JP)
• OSTI ID: 5819225
• Journal Information: Rev. Sci. Instrum.; (United States), Vol. 60:7
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
CARBON
REMOVAL
KEK PHOTON FACTORY
DC SYSTEMS
OPTICAL EQUIPMENT
CONTAMINATION
SURFACE CLEANING
EFFICIENCY
ELECTRIC DISCHARGES
IN-SITU PROCESSING
OXYGEN
PLASMA
SYNCHROTRON RADIATION
ULTRAHIGH VACUUM
BREMSSTRAHLUNG
CLEANING
ELECTROMAGNETIC RADIATION
ELEMENTS
ENERGY SYSTEMS
EQUIPMENT
NONMETALS
POWER SYSTEMS
PROCESSING
RADIATION SOURCES
RADIATIONS
SURFACE FINISHING
SYNCHROTRON RADIATION SOURCES
430400* - Particle Accelerators- Storage Rings