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Title: Infrared reflection spectra in contactless nondestructive measurements of the electron density and mobility in indium phosphide

Journal Article · · Sov. Phys. J. (Engl. Transl.); (United States)
DOI:https://doi.org/10.1007/BF00896680· OSTI ID:5777232

On the basis of numerical calculations and experimental studies we analyze the possibilities of measuring the electrophysical parameters of indium phosphide by means of infrared reflection spectra at wavelengths ranging from 5 to 200 /mu/m. We demonstrate that contactless nondestructive measurements of the electron density in the range 10/sup 16/-10/sup 20/ cm/sup /minus/3/ can be made with a relative error not exceeding 15%, and of mobility with a relative error not exceeding 25%. A nomogram method is presented for rapid conversion of data form infrared reflection spectra into the parameters being measured.

Research Organization:
N.M. Lobachevskii State Univ., Gorkii (USSR)
OSTI ID:
5777232
Journal Information:
Sov. Phys. J. (Engl. Transl.); (United States), Vol. 31:1; Other Information: Translated from Izv. Vyssh. Uchebn. Zaved., Fiz.; 31: No. 1, 22-27(Jan 1987)
Country of Publication:
United States
Language:
English