Infrared reflection spectra in contactless nondestructive measurements of the electron density and mobility in indium phosphide
Journal Article
·
· Sov. Phys. J. (Engl. Transl.); (United States)
On the basis of numerical calculations and experimental studies we analyze the possibilities of measuring the electrophysical parameters of indium phosphide by means of infrared reflection spectra at wavelengths ranging from 5 to 200 /mu/m. We demonstrate that contactless nondestructive measurements of the electron density in the range 10/sup 16/-10/sup 20/ cm/sup /minus/3/ can be made with a relative error not exceeding 15%, and of mobility with a relative error not exceeding 25%. A nomogram method is presented for rapid conversion of data form infrared reflection spectra into the parameters being measured.
- Research Organization:
- N.M. Lobachevskii State Univ., Gorkii (USSR)
- OSTI ID:
- 5777232
- Journal Information:
- Sov. Phys. J. (Engl. Transl.); (United States), Vol. 31:1; Other Information: Translated from Izv. Vyssh. Uchebn. Zaved., Fiz.; 31: No. 1, 22-27(Jan 1987)
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
INDIUM PHOSPHIDES
INFRARED SPECTRA
MONOCRYSTALS
ELECTRON MOBILITY
SEMICONDUCTOR MATERIALS
ELECTRON DENSITY
CALIBRATION
CRYSTAL DOPING
DIELECTRIC PROPERTIES
DOPED MATERIALS
HALL EFFECT
NOMOGRAMS
NONDESTRUCTIVE TESTING
CRYSTALS
DIAGRAMS
ELECTRICAL PROPERTIES
INDIUM COMPOUNDS
MATERIALS
MATERIALS TESTING
MOBILITY
PARTICLE MOBILITY
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
SPECTRA
TESTING
360603* - Materials- Properties
INDIUM PHOSPHIDES
INFRARED SPECTRA
MONOCRYSTALS
ELECTRON MOBILITY
SEMICONDUCTOR MATERIALS
ELECTRON DENSITY
CALIBRATION
CRYSTAL DOPING
DIELECTRIC PROPERTIES
DOPED MATERIALS
HALL EFFECT
NOMOGRAMS
NONDESTRUCTIVE TESTING
CRYSTALS
DIAGRAMS
ELECTRICAL PROPERTIES
INDIUM COMPOUNDS
MATERIALS
MATERIALS TESTING
MOBILITY
PARTICLE MOBILITY
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
SPECTRA
TESTING
360603* - Materials- Properties