Synthesis of high transition temperature superconducting Y-Ba-Cu-O films by radio-frequency plasma flash evaporation

Journal Article · Sat Dec 01 04:00:00 EST 1990 · IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (USA)

DOI:https://doi.org/10.1109/27.61513· OSTI ID:5764171

Terashima, K; Yoshida, T ^[1]; Komaki, H ^[2]

---

1. Tokyo Univ. (Japan). Faculty of Engineering
2. JEOL Ltd., 1418 Nakagami, Akishima-shi, Tokyo 196 (JP)

This paper reports on a process for the deposition of multicomponent systems, namely, radio-frequency (RF) plasma flash evaporation, in which powder mixtures of constituents are continuously injected into a RF plasma and are co-evaporated and co-deposited onto a substrate. The Y-Ba-Cu-O films prepared by this method showed excellent superconducting properties without postannealing, and a deposition rate above several hundred nm/min was achieved. Particularly, the film deposited on a MgO (100) substrate at 700{sup {degrees}}C revealed c-axis-oriented, polycrystalline orthorombic, oxygen-deficient perovskite showing a superconducting transition temperature T{sub c} of 87 K and a critical current density J{sub c} of the order of 1 {times} 10{sup 6} a/cm{sup 2} at 77 K estimated from the magnetization. The conditions of plasmas during the depositions were also measured by optical emission spectroscopy.

• OSTI ID: 5764171
• Journal Information: IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (USA), Journal Name: IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (USA) Vol. 18:6; ISSN ITPSB; ISSN 0093-3813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CRYSTALS
CURRENTS
DISPERSIONS
ELECTRIC CURRENTS
EVAPORATION
FILMS
HEAT TREATMENTS
HIGH-TC SUPERCONDUCTORS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MAGNETIZATION
MIXTURES
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
PLASMA
PLASMA DIAGNOSTICS
POLYCRYSTALS
POWDERS
RF SYSTEMS
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
SYNTHESIS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES