Angular distribution of Ga sup + ions desorbed by 3-keV ion bombardment of GaAs(110)
Journal Article
·
· Physical Review, B: Condensed Matter; (USA)
OSTI ID:5751800
- The PenAniveArsity, 152 Davey Laboratory, University Park, Pennsylvania (USA)
Angular distributions of Ga{sup +} ions desorbed from GaAs(110) surfaces by 3-keV Ar{sup +}-ion bombardment under low-dose conditions have been determined. The distributions exhibit a high degree of anisotropy along the {l angle}{bar 1}00{r angle} crystallographic direction with smaller peaks observed in several other specific directions. Using simple geometric analyses and with microscopic insight extracted from results of molecular-dynamics computer simulations on Si(110), we have been able to identify the scattering mechanisms that give rise to these peaks. The most dominant feature is found to arise from a specific collision sequence wherein a surface atom is ejected by direct collisions with a second-layer atom along the bond direction. This mechanism is interesting in that it contrasts with the channeling and blocking mechanisms previously reported for fcc metals. The positions of other peaks in the angular distributions have been determined with use of simple geometrical arguments. We also examine the expected effect of the known GaAs(110) surface reconstruction on the observed patterns. These results should prove useful for testing molecular-dynamics calculations on ion-bombarded GaAs targets and may ultimately lead to a new approach to examining the surface structure of these types of complex materials.
- OSTI ID:
- 5751800
- Journal Information:
- Physical Review, B: Condensed Matter; (USA), Journal Name: Physical Review, B: Condensed Matter; (USA) Vol. 42:17; ISSN PRBMD; ISSN 0163-1829
- Country of Publication:
- United States
- Language:
- English
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Mon Oct 15 00:00:00 EDT 1990
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OSTI ID:6057048
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· Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)
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OSTI ID:7115799
Related Subjects
656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANGULAR DISTRIBUTION
ANISOTROPY
ARGON IONS
ARSENIC COMPOUNDS
ARSENIDES
CHARGED PARTICLES
COLLISIONS
CRYSTAL FACES
DESORPTION
DISTRIBUTION
ENERGY RANGE
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
GALLIUM IONS
ION COLLISIONS
IONS
KEV RANGE
KEV RANGE 01-10
PNICTIDES
SURFACE PROPERTIES
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANGULAR DISTRIBUTION
ANISOTROPY
ARGON IONS
ARSENIC COMPOUNDS
ARSENIDES
CHARGED PARTICLES
COLLISIONS
CRYSTAL FACES
DESORPTION
DISTRIBUTION
ENERGY RANGE
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
GALLIUM IONS
ION COLLISIONS
IONS
KEV RANGE
KEV RANGE 01-10
PNICTIDES
SURFACE PROPERTIES