High-T /SUB c/ SNS dc SQUIDS produced by electron beam lithography
The authors have utilized electron beam lithography to fabricate dc SQUIDs incorporating Nb/sub 3/Ge/Cu/Nb/sub 3/Ge stepedge microbridges. The primary advantage of this process, over conventional lithography, is to decrease the width of the microbridges and hence increase their normal resistance. The microbridges produced typically have normal resistances between 0.1-1.0 ..cap omega.., and they have investigated the behavior of the resistance as the width is scaled down. The dc SQUIDs operate without hysteresis over a wide temperature range and exhibit substantial critical current modulation in the presence of a magnetic field, from which they estimate the inductance of the SQUIDs to be about 13 pH. These devices should possess extremely low self-heating effects by virtue of the twodimensional geometry of the banks made possible by the use of a novel ion beam etching technique. Preliminary noise measurements indicate an intrinsic energy sensitivity as low as 3 h at 2.2 K.
- Research Organization:
- Dept. of Applied Physics, Stanford University, Stanford, CA 94305
- OSTI ID:
- 5747021
- Journal Information:
- IEEE Trans. Magn.; (United States), Vol. 19:3
- Country of Publication:
- United States
- Language:
- English
Similar Records
Thin film Nb/sub 3/Ge dc-SQUID with high operating temperature
Focused ion beam high T sub c superconductor dc SQUIDs
Related Subjects
GENERAL PHYSICS
SQUID DEVICES
ELECTRIC CONDUCTIVITY
FABRICATION
SENSITIVITY
COPPER
CRITICAL CURRENT
DC SYSTEMS
ELECTRON BEAMS
GERMANIUM ALLOYS
HYSTERESIS
INTERMETALLIC COMPOUNDS
NIOBIUM BASE ALLOYS
ALLOYS
BEAMS
CURRENTS
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
ELECTRONIC EQUIPMENT
ELEMENTS
ENERGY SYSTEMS
EQUIPMENT
FLUXMETERS
LEPTON BEAMS
MEASURING INSTRUMENTS
METALS
MICROWAVE EQUIPMENT
NIOBIUM ALLOYS
PARTICLE BEAMS
PHYSICAL PROPERTIES
POWER SYSTEMS
SUPERCONDUCTING DEVICES
TRANSITION ELEMENTS
420201* - Engineering- Cryogenic Equipment & Devices