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Microscopic calculation of critical layer thickness for coherently strained silicon-like structures

Conference ·
OSTI ID:5743293
Monte Carlo based microscopic techniques were used to study the stability of thin coherently strained layers of mismatched silicon-like semiconductor material grown on the (111) silicon surface. The atomic interaction used for this study is the Stillinger-Weber potential, modified to allow modelling of mismatched materials. Mismatched layers from 3 to 80 A thickness were considered. For layers greater than about 20 A thickness, the critical layer thickness is accurately described by the continuum theory of Matthews and Blakeslee. For thinner layers, however, the strain energy associated with misfit dislocations becomes greater than the continuum value, resulting in smaller critical layer thickness, to the extent that critical mismatch as a function of layer thickness becomes non-monotonic for the thinnest films considered.
Research Organization:
Sandia National Labs., Albuquerque, NM (USA)
DOE Contract Number:
AC04-76DP00789
OSTI ID:
5743293
Report Number(s):
SAND-86-0031C; CONF-8605111-1; ON: DE86009853
Country of Publication:
United States
Language:
English

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