Growth Mechanisms of CVD Diamond Films Determined by a Novel TEM Technique

Conference · Fri Aug 30 04:00:00 EDT 2013 · Materials Science Monographs Applications of Diamond Films and Related Materials - Proceedings of the First International Conference on the Applications of Diamond Films and Related Materials – ADC '91 Auburn, Alabama, U.S.A., August 17–22, 1991

DOI:https://doi.org/10.1016/b978-0-444-89162-4.50079-8· OSTI ID:5734512

Wang, Z. L. ^[1]; Bentley, J. ^[2]; Clausing, R. E. ^[2]; Heatherly, L. ^[2]; Horton, L. L. ^[2]

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1. Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States); Univ. of Tennessee, Knoxville, TN (United States)
2. Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

A novel transmission electron microscopy (TEM) technique is introduced for studying thick as-grown CVD diamond films. For a <001> texture consisting of 2-3 μm-diam grains with (001) and {111} facets, we have found that the core volume bounded by the (001) top facet and orthogonal {110} (i.e., the volume shadowed by the (001) top) is free from microtwins and stacking faults, but may contain a few dislocations. The remaining volume around the core, bounded by {111} facets, is filled with microtwins. The formation of microtwins in CVD diamond is associated with growth on {111}. For a <001> texture with only (001) and near {110} facets, the film is free from microtwins but contains more dislocations. A (001) twin-free column model is described to summarize all these observations.

• Research Organization: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
• Sponsoring Organization: USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division (MSE)
• DOE Contract Number: AC05-84OR21400
• OSTI ID: 5734512
• Report Number(s): CONF-910854--1; ON: DE91011095
• Conference Information: Journal Name: Materials Science Monographs Applications of Diamond Films and Related Materials - Proceedings of the First International Conference on the Applications of Diamond Films and Related Materials – ADC '91 Auburn, Alabama, U.S.A., August 17–22, 1991 Journal Volume: 73
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360602* -- Other Materials-- Structure &amp; Phase Studies
CARBON
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
DEPOSITION
DIAMONDS
ELECTRON MICROSCOPY
ELEMENTAL MINERALS
ELEMENTS
FILMS
MICROSCOPY
MICROSTRUCTURE
MINERALS
NONMETALS
SURFACE COATING
THIN FILMS
TRANSMISSION ELECTRON MICROSCOPY