Hot filament activated chemical vapor deposition of boron nitride

Journal Article · Wed May 01 04:00:00 EDT 1991 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)

DOI:https://doi.org/10.1116/1.577583· OSTI ID:5732770

Rye, R R ^[1]

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1. Sandia National Laboratories, Albuquerque, New Mexico 87185 (US)

Using a hot filament ({approx}1400 {degree}C) to activate borazine (B{sub 3}N{sub 3}H{sub 6}) molecules for subsequent reaction with a direct line-of-sight substrate, transparent boron nitride films as thick as 25 000 A have been grown for substrate temperatures as low as 100 {degree}C. The minimum temperature is determined by radiative heating from the adjacent hot filament. The low temperature BN films show no indication of crystallinity with x-ray diffraction (XRD), but the opaque BN deposit produced on the hot filament is identified by XRD as polycrystalline {ital h}-BN. X-ray photoelectron spectra (XPS) show the films to have a B:N ratio (within experimental error) of 1:1 with no other XPS detectable impurities above the 0.5% level. Both Raman and infrared (IR) spectroscopy are characteristic of {ital h}-BN with small amounts of hydrogen detected as N--H and B--H bands in the IR spectrum. The important feature of this method is the separation and localization of the thermal activation step at the hot filament from the surface reaction and film growth steps at the substrate surface. This allows both higher temperature thermal activation and lower temperature film growth.

• DOE Contract Number: AC04-76DP00789
• OSTI ID: 5732770
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA) Vol. 9:3; ISSN JVTAD; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
BORON COMPOUNDS
BORON NITRIDES
CHEMICAL COATING
CHEMICAL COMPOSITION
CHEMICAL VAPOR DEPOSITION
COHERENT SCATTERING
CRYSTALS
DEPOSITION
DIFFRACTION
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
FILMS
HEAT TREATMENTS
INFRARED SPECTRA
IONIZING RADIATIONS
NITRIDES
NITROGEN COMPOUNDS
PHOTOELECTRON SPECTROSCOPY
PNICTIDES
POLYCRYSTALS
RADIATIONS
RAMAN SPECTRA
SCATTERING
SPECTRA
SPECTROSCOPY
SURFACE COATING
X RADIATION
X-RAY DIFFRACTION