Thin film inductor with multilayer magnetic core

Journal Article · Sun Feb 28 23:00:00 EST 1993 · IEEE Translation Journal on Magnetics in Japan (Institute of Electrical and Electronics Engineers); (United States)

DOI:https://doi.org/10.1109/TJMJ.1993.4565598· OSTI ID:5708690

Shirakawa, K; Kurata, H; Kasuya, M; Ohnuma, S; Toryu, J; Murakami, K

In this work, thin film microinductors were investigated from the standpoint of increasing the quality factor (Q) and inductance (L). To obtain a high Q, it is important to use a magnetic core with a small iron loss at high frequencies. Thin film microinductors were prepared using multilayered CoNbZr/AlN film. The optimum conditions for a high Q were investigated by changing the size of the magnetic core and the structure of the multilayer film and exciting coil. The Q and L values increased with decreasing thickness of individual magnetic layers and with increasing intermediate layer thickness. The demagnetization of the inductor open magnetic circuit was decreased by using a multilayer magnetic core. The stray capacitance between coil and magnetic core is dominant in these thin film inductors. It was found that multilayer magnetic core is useful for increasing the Q and L values of thin film inductors at high frequencies. An experimental inductor in which iron and copper losses were reduced through the use of a multilayer core and thick coil had an L = 120 nH and Q = 18 at 50 MHz, and measured 0.5 mm x 2.5 mm x 35 [mu]m.

• OSTI ID: 5708690
• Journal Information: IEEE Translation Journal on Magnetics in Japan (Institute of Electrical and Electronics Engineers); (United States), Journal Name: IEEE Translation Journal on Magnetics in Japan (Institute of Electrical and Electronics Engineers); (United States) Vol. 8:3; ISSN ITJJER; ISSN 0882-4959
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
426000* -- Engineering-- Components
Electron Devices & Circuits-- (1990-)
ALLOYS
ALUMINIUM COMPOUNDS
ALUMINIUM NITRIDES
COBALT ALLOYS
DEMAGNETIZATION
ELECTRIC COILS
ELECTRICAL EQUIPMENT
ELECTRONIC EQUIPMENT
EQUIPMENT
FABRICATION
FILMS
LAYERS
MAGNETS
MINIATURIZATION
NIOBIUM ALLOYS
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
SOLENOIDS
THIN FILMS
ZIRCONIUM ALLOYS