Miniaturized liquid metal ion sources (MILMIS)

Journal Article · Tue Oct 01 00:00:00 EDT 1991 · IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States)

DOI:https://doi.org/10.1109/27.108416· OSTI ID:5675749

Mitterauer, J ^[1]

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1. Inst. fuer Allgemeine Elektrotechnik und Elektronik Technische, Univ. Wein, Gusshausstrasse 27-29, 1040 Vienna (AT)

In this paper, introductory remarks are given on ion sources, which are typical spin-offs of space technology, and basic features of liquid metal ion sources (LMIS) are outlined. A special by-product of field-emission electric space propulsion by a liquid metal ion thruster is the slit emitter, which may be qualified as a semiminiaturized LMIS. The state-of-the-art technology of field-emitter arrays common in vacuum microelectronics is presented in view of the fabrication of miniaturized, integrated, liquid metal ion sources (MILMIS). The possibility of operation of these devices even in the field-emission mode as miniaturized liquid metal electron sources (MILMES) is discussed. Finally, an outlook is given on prospective applications of MILMIS and MILMES, including micromachining and microelectronic device technology (e.g., focused ion-beam techniques), space technology (e.g., ion thrusters with integrated neutralizers), and pulsed power technology (e.g., high-power switching and ion beam sources for inertial confinement fusion).

• OSTI ID: 5675749
• Journal Information: IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States), Journal Name: IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States) Vol. 19:5; ISSN ITPSB; ISSN 0093-3813
• Country of Publication: United States
• Language: English

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ELECTRONIC CIRCUITS
ELEMENTS
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FIELD EMISSION
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