Measurements of negative ion density in high-density oxygen plasmas by probe-assisted laser photodetachment
- Department of Electronics, Nagoya University, Nagoya 464-01 (Japan)
Probe-assisted laser photodetachment has been developed and applied to measure the negative ion density (n{sub {minus}}) in high-density plasmas. Temporal variation of n{sub {minus}} is obtained in high-density and low-pressure oxygen plasmas generated by helicon wave excitation. Negative ions are not observed in the active discharge phase and rapid increase of n{sub {minus}} is seen only in the afterglow phase. This efficient production of negative ions is considered to be due to dissociative electron attachment to metastable molecular states, O{sub 2}{sup M}(A{sup 3}{Sigma}{sub u}{sup +}, A{sup {prime}}{sup 3}{Delta}{sub u}, and c{sup 1}{Sigma}{sub u}{sup {minus}}), located at 4{endash}5 eV above the ground state. {copyright} {ital 1998 American Institute of Physics.}
- OSTI ID:
- 565643
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 2 Vol. 83; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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