High power KrF laser with a phase-unifying unstable cavity

Journal Article · Sun Nov 30 23:00:00 EST 1997 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.120504· OSTI ID:565538

De Nunzio, G; Perrone, M R; Panzera, C ^[1]; Flori, D; Piegari, A; Scaglione, S ^[2]

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1. Dipartimento di Fisica, Istituto Nazionale per la Fisica della Materia, INFM Universita di Lecce, 73100 Lecce (Italy)
2. Laboratorio Film Sottili, ENEA Casaccia, 00060 S. Maria di Galeria, Roma (Italy)

The performance of a 0.45 J KrF excimer laser with an unstable cavity using a phase-unifying mirror as an output coupler is described. The output beam having a cross section of 2.4{times}1.2cm{sup 2} exhibits a smooth far field profile with 86.5{percent} of the total near field energy contained within a far-field full angle {theta}{le}0.05mrad. The measurements for determining the beam quality factor M{sup 2} and the beam angular stability are also reported. {copyright} {ital 1997 American Institute of Physics.}

• OSTI ID: 565538
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 26 Vol. 71; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
EXCIMER LASERS
HAFNIUM OXIDES
KRYPTON FLUORIDE LASERS
LASER CAVITIES
LASER MIRRORS
PERFORMANCE
POTASSIUM COMPOUNDS
REFLECTIVE COATINGS