Si-H bond activation on Cu: Reaction of silane on Cu(111)
- Univ. of Illinois, Urbana, IL (United States)
The activation and decomposition of silane on Cu(111) have been studied using Fourier transform infrared (FTIR), Auger electron (AES), and temperature-programmed reaction (TPRS) spectroscopies, as well as low-energy electron diffraction (LEED). Silane dissociatively chemisorbs on Cu(111) at 90 K. Cleavage of the Si-H bond yields two structurally distinct adsorbed silyl fragments. Infrared spectroscopy identifies the predominant intermediates formed under these conditions as being adsorbed SiH[sub 2] and SiH species. The relative and absolute concentrations of these intermediates depend sensitively on the surface coverage of both Si and H, which themselves depend upon the silane exposure. SiH[sub 2] is stable over a wide range of coverage up to 180 K, where it then undergoes Si-H bond cleavage to form surface bound SiH. At higher temperatures, bond scission in the Si-H moiety results in the formation of adsorbed silicon atoms and the desorption of dihydrogen in a peak centered at [approximately]330 K. Auger electron spectra show that the amount of silicon deposited on the Cu(111) surface in this way is approximately one-third of the amount deposited on a stable Cu[sub 3]Si surface. This latter surface is readily formed by carrying out the silane exposure at temperatures above 300 K. 39 refs., 15 figs., 1 tab.
- DOE Contract Number:
- FG02-91ER45439
- OSTI ID:
- 5651782
- Journal Information:
- Journal of Physical Chemistry; (United States), Journal Name: Journal of Physical Chemistry; (United States) Vol. 97:44; ISSN JPCHAX; ISSN 0022-3654
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
400102 -- Chemical & Spectral Procedures
400201* -- Chemical & Physicochemical Properties
AUGER ELECTRON SPECTROSCOPY
CHEMICAL ACTIVATION
CHEMICAL REACTIONS
COHERENT SCATTERING
COPPER
COPPER COMPOUNDS
COPPER SILICIDES
DECOMPOSITION
DIFFRACTION
ELECTRON DIFFRACTION
ELECTRON SPECTROSCOPY
ELEMENTS
HYDRIDES
HYDROGEN COMPOUNDS
INFRARED SPECTRA
METALS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
SCATTERING
SILANES
SILICIDES
SILICON COMPOUNDS
SPECTRA
SPECTROSCOPY
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS