Development of a supersonic O(/sup 3/P/sub J/), O(/sup 1/D/sub 2/) atomic oxygen nozzle beam source

Journal Article · Thu Jan 31 19:00:00 EST 1980 · Rev. Sci. Instrum.; (United States)

DOI:https://doi.org/10.1063/1.1136170· OSTI ID:5636048

Sibener, S J; Buss, R J; Ng, C Y; Lee, Y T

A high pressure, radio frequency discharge nozzle beam source has been developed for the production of very intense (> or =10/sup 18/ atoms sr/sup -1/ s/sup -1/) supersonic beams of oxygen atoms. An efficient impedance matching scheme has been devised for coupling the radio frequency power to oxygen--rare gas mixtures as a function of gas pressure, temperature, and composition. Techniques for localizing the discharge directly behind the orifice of a specially designed quartz nozzle have also been developed. The above combine to yield a beam source which reliably produces a high degree of molecular dissociation in oxygen--rare gas mixtures at pressures up to 350 Torr. Atomic oxygen mean translational energies from 0.14--0.50 eV have been achieved using the seeded beams technique with Mach numbers up to 10 being realized. When helium is used as the carrier gas both O(/sup 3/P/sub J/) and O(/sup 1/D/sub 2/) atoms are present in the beam, while only ground state atoms appear to be present in argon seeded mixtures. This paper describes the design, construction, and operation of this beam source and provides a characterization of the atomic oxygen beams it has reproducibly generated in our laboratory.

• Research Organization: Materials and Molecular Research Division, Lawrence Berkeley Laboratory and Department of Chemistry, University of California, Berkeley, California 94720
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 5636048
• Journal Information: Rev. Sci. Instrum.; (United States), Journal Name: Rev. Sci. Instrum.; (United States) Vol. 51:2; ISSN RSINA
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ATOMIC BEAMS
BEAMS
CHALCOGENIDES
COUPLING
CRYOGENIC FLUIDS
DATA
DESIGN
DISPERSIONS
ELECTRIC DISCHARGES
ELEMENTS
FLUID FLOW
FLUIDS
IMPEDANCE
INFORMATION
MIXTURES
NONMETALS
NOZZLES
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PRESSURE DEPENDENCE
QUANTITY RATIO
QUARTZ
RARE GASES
SILICON COMPOUNDS
SILICON OXIDES
SUPERSONIC FLOW
TEMPERATURE DEPENDENCE