Method and apparatus for conducting variable thickness vapor deposition
Patent
·
OSTI ID:5619782
A method of vapor depositing metal on a substrate in variable thickness comprises conducting the deposition continuously without interruption to avoid formation of grain boundaries. To achieve reduced deposition in specific regions a thin wire or ribbon blocking body is placed between source and substrate to partially block vapors from depositing in the region immediately below.
- Research Organization:
- Mound Plant (MOUND), Miamisburg, OH (United States)
- DOE Contract Number:
- AC04-76DP00053
- Assignee:
- Dept. of Energy
- Application Number:
- ON: DE85011653
- OSTI ID:
- 5619782
- Country of Publication:
- United States
- Language:
- English
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