Development of turbo-viscous pump with ceramic rotor assembly and oil-free driving unit
- Japan Atomic Energy Research Institute (JAERI), Naka Fusion Research Establishment, Naka-machi, Naka-gun, Ibaraki-ken, Japan (JP)
- Mitsubishi Heavy Industries, Ltd., 4-6-22, Kan-on-shinmachi, Hiroshima, Japan (JP)
In order to establish a dynamic pumping system for fusion reactors and other advanced vacuum devices, a new type of roughing pump named turbo-viscous pump has been developed. The construction of the pump features a multistage ceramic (silicon nitride) rotor assembly and an oil-free driving unit. The rotor assembly has parallel rotor disks, between which project stator disks from the outer casing with rotor-stator clearances {lt}100 {mu}m, and a shaft with gas turbine blades. Spiral grooves are cut on either side of the rotor or stator disk of each stage, each of them starting near the center (or at the periphery) and ending at the periphery (or near the center). The pump shaft is supported by gas bearings and is driven by gas impulse turbines at {similar to}25 000 rpm. No lubricating or cooling oil is used. The turbo-viscous pump works in a wide pressure range from atmospheric pressure to 10{sup {minus}3} Pa. The pumping speed and ultimate pressure attained so far are 0.28 m{sup 3}/min (at inlet pressures between 10{sup {minus}1} and 10{sup 2} Pa) and 1{times}10{sup {minus}3} Pa, respectively.
- OSTI ID:
- 5603488
- Journal Information:
- Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Vol. 9:3; ISSN 0734-2101
- Country of Publication:
- United States
- Language:
- English
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