Monte-Carlo simulation of electron properties in rf parallel plate capacitively coupled discharges
Electron properties in a parallel plate capacitively coupled rf discharge are studied with results from a Monte-Carlo simulation. Time averaged, spatially dependent electron distributions are computed by integrating, in time, electron trajectories as a function of position while oscillating the applied electric field at rf frequencies. The dc component of the sheath potential is solved for in a self-consistent manner during the simulation. For conditions where the secondary emission coefficient for electrons from the electrodes is large, the electron distribution is spatially differentiated, being dominated by an e-beam component near the electrodes while being nearly in equilibrium with the applied electric field in the body of the plasma. The dc component of the sheath potential is found to be a function of the ratio lambda/d, where lambda is the electron mean free path and d is the electrode spacing.
- Research Organization:
- Lawrence Livermore National Laboratory, University of California, Livermore, California 94550
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 5602326
- Journal Information:
- J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 54:9; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
700105* -- Fusion Energy-- Plasma Research-- Plasma Kinetics-Theoretical-- (-1987)
CAPACITORS
COUPLING
CURRENTS
DIRECT CURRENT
DISTRIBUTION
ELECTRIC CURRENTS
ELECTRIC DISCHARGES
ELECTRIC FIELDS
ELECTRICAL EQUIPMENT
ELECTRICAL PROPERTIES
ELECTRODES
EMISSION
EQUILIBRIUM
EQUIPMENT
MATHEMATICAL MODELS
MEAN FREE PATH
MONTE CARLO METHOD
ORIENTATION
PHYSICAL PROPERTIES
PLATES
RF SYSTEMS
SECONDARY EMISSION
SIMULATION
SPACE DEPENDENCE
SPATIAL DISTRIBUTION