Axial radio frequency electric field intensity and ion density during low to high mode transition in argon electron cyclotron resonance discharges
- Department of Chemical Engineering, Plasma Assisted Materials Processing Laboratory, Univerity of California, Berkeley, California 94720 (USA)
- Department of Electrical Engineering, University of California, Berkeley, California 94720 (USA) Department of Computer Sciences, Plasma Assited Materials Processing Laboratory, University of California, Berkeley, California 94720 (USA)
To investigate the transition from the low density mode to the high density mode in an electron cyclotron resonance (ECR) discharge, a Langmuir probe and an {ital E} field probe were used to measure ion density and {ital E} field intensity as functions of axial position and power. The experiments were performed in argon at 0.13 Pa in a 7.9 cm diam cyclindrical source chamber propagating TE{sub 11} mode 2.45 GHz microwave power. Low mode was characterized by a standing wave throughout the plasma chamber and minimal power absorption. High mode exhibited nearly complete power absorption and no standing wave past the ECR zone. A sliding short (ss) was used to determine if the position of an {ital E} field null in the source chamber affected the transition between these two modes for various magnetic field configurations. The ss position had little effect on mode transition, relative power absorption or ion density when positioned downstream from a broad, large volume resonance zone (resonance near the mirror midplane). However, the plasma could not be ignited if the short was placed at or upstream from the large volume resonance zone.
- DOE Contract Number:
- FG03-87ER13727
- OSTI ID:
- 5588243
- Journal Information:
- Journal of Vacuum Science and Technology, B: Microelectronics Processing and Phenomena; (USA), Vol. 9:2; ISSN 0734-211X
- Country of Publication:
- United States
- Language:
- English
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