Monolithic imager for near-ir
Patent
·
OSTI ID:5584220
A monolithic imager utilizing a plurality of detector cells is formed on a common intrinsic substrate. Backside illumination in the near-ir region generates hole-electron pairs in the intrinsic material which may be depleted throughout its thickness by ccdrange voltages applied by the imager's readout structure to an over-lying, thinly doped epitaxial layer. Minority carriers migrate toward a collection node which is formed in the epitaxial layer (And protrudes into the substrate), accumulating in an inversion layer at the surface of the epitaxial layer. The accumulated charge is advanced to an output diffusion in the epitaxial layer by means of a readout system which provides semirandom addressing of the transfer gate electrodes of the individual detector cells.
- Assignee:
- Hughes Aircraft Co
- Patent Number(s):
- US 4198646
- OSTI ID:
- 5584220
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
440300* -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
DESIGN
ELECTROMAGNETIC RADIATION
EPITAXY
HOLES
IMAGE PROCESSING
INFRARED RADIATION
MEASURING INSTRUMENTS
MONITORING
NEAR INFRARED RADIATION
PROCESSING
RADIATION DETECTORS
RADIATION MONITORING
RADIATIONS
SEMICONDUCTOR DETECTORS
SUBSTRATES
47 OTHER INSTRUMENTATION
DESIGN
ELECTROMAGNETIC RADIATION
EPITAXY
HOLES
IMAGE PROCESSING
INFRARED RADIATION
MEASURING INSTRUMENTS
MONITORING
NEAR INFRARED RADIATION
PROCESSING
RADIATION DETECTORS
RADIATION MONITORING
RADIATIONS
SEMICONDUCTOR DETECTORS
SUBSTRATES