GaAs ohmic contacts for high temperature devices

Conference · Tue Jan 01 04:00:00 EST 1980

OSTI ID:5583445

Coquat, J A; Palmer, D W

Instrumentation requirements for geothermal wells, jet engines, and nuclear reactors have exceeded the high temperature capability of silicon devices. As one part of a program to develop high temperature compound semiconductor devices, four basic ohmic contact systems for n-type GaAs have been evaluated for contact resistance as a function of temperature (24 to 350/sup 0/C) and time (at 300/sup 0/C): Ni/AuGe; Ag/Si and Ag/Ni/Si; Al/Ge and Al/AlGe; and Au/Nb/Si and Pt/Nb/Si. Optimization of processing parameters produced viable high temperature contacts with all but the Al/Ge systems. Aging at 300/sup 0/C changed the contact resistivity in only the Ag/Ni/Si contacts. Film adhesion was excellent for the Al/Ge, Ni/AuGe, and Ag/Si systems as measured with ultrasonic Al wire bond pull strengths. Lower adhesion was noticed with Nb/Si systems measured with gold wire bond pull strengths.

• Research Organization: Sandia Labs., Albuquerque, NM (USA)
• DOE Contract Number: EY-76-C-04-0789
• OSTI ID: 5583445
• Report Number(s): SAND-79-2122C; CONF-800410-3
• Country of Publication: United States
• Language: English

Related Subjects

15 GEOTHERMAL ENERGY
150901 -- Geothermal Engineering-- Drilling Technology & Well Hardware
21 SPECIFIC NUCLEAR REACTORS AND ASSOCIATED PLANTS
210000 -- Nuclear Power Plants
36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
ALLOYS
ALUMINIUM
ALUMINIUM ADDITIONS
ALUMINIUM ALLOYS
DEPOSITION
DIMENSIONS
ELECTRIC CONTACTS
ELECTRICAL EQUIPMENT
ELEMENTS
ENGINES
EQUIPMENT
EVAPORATORS
GEOTHERMAL WELLS
GERMANIUM ALLOYS
GOLD ALLOYS
ION IMPLANTATION
METALLOGRAPHY
METALS
NICKEL
NICKEL ADDITIONS
NICKEL ALLOYS
NIOBIUM ALLOYS
PHYSICAL PROPERTIES
PLATINUM ALLOYS
PLATINUM METAL ALLOYS
REACTORS
SILICON ALLOYS
SILVER
SILVER ALLOYS
SURFACE COATING
THERMODYNAMIC PROPERTIES
THICKNESS
TRANSITION ELEMENTS
WELLS