Determination of water in hydrogen chloride gas by a condensation technique

Journal Article · Tue Jul 01 00:00:00 EDT 1986 · Anal. Chem.; (United States)

DOI:https://doi.org/10.1021/ac00121a070· OSTI ID:5569572

Flaherty, E; Herold, C; Murray, D; Thompson, S R

The determination of trace amounts of water in gaseous hydrogen chloride has been of considerable interest to manufacturers of semiconductor materials. Many different methods have been postulated in the detection of water in hydrogen chloride, including Karl Fischer titrations, infrared spectrometric techniques, and gravimetric procedures using desiccants. Despite varying degrees of success at high-moisture concentration ranges, 1000 ppm (v/v) and up, these methods become tedious and unreliable for measuring water in hydrogen chloride in the 1-1000 ppm range. We have found a method for moisture in hydrogen chloride, analogous to dew point determinations used for inert gases, that is rapid and reproducible. A calibration curve of parts per million (v/v) water in hydrogen chloride vs. condensation temperature was constructed by dynamically blending a low part per million moisture balance nitrogen standard with dried hydrogen chloride gas. In addition, variation of the condensation temperature was monitored as the dried hydrogen chloride was diluted with dried gaseous nitrogen.

• Research Organization: Matheson Gas Products, Inc., East Rutherford, NJ
• OSTI ID: 5569572
• Journal Information: Anal. Chem.; (United States), Vol. 58:8
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
CHLORIDES
SEPARATION PROCESSES
HYDROGEN COMPOUNDS
WATER
VAPOR CONDENSATION
EXPERIMENTAL DATA
GASES
NITROGEN
TRACE AMOUNTS
VAPOR PRESSURE
CHLORINE COMPOUNDS
DATA
ELEMENTS
FLUIDS
HALIDES
HALOGEN COMPOUNDS
INFORMATION
NONMETALS
NUMERICAL DATA
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
THERMODYNAMIC PROPERTIES
400105* - Separation Procedures