Preparation and characterization of fcc Mo/sub x/Nb/sub 1//sub -x/(N/sub y/C/sub 1//sub -y/)/sub z/ thin films

Journal Article · Wed May 01 04:00:00 EDT 1985 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.572975· OSTI ID:5564938

Qadri, S B; Fuller, W W; Kihlstrom, K E; Simon, R W; Skelton, E F; VanVechten, D; Wolf, S A

In an attempt to make the predicted high superconducting transition temperature (T/sub c/) form of MoN, we have prepared and characterized thin films of Mo/sub x/Nb/sub 1-x/(N/sub y/C/sub 1-y/)/sub z/, where 0.93>x>0, 1.0>y>0.8, and 1.0>z>5. These films were reactively rf sputtered in a UHV system using an evenly split Nb--Mo split target and mixtures of argon, nitrogen, and cyanogen gases. Films prepared at elevated substrate temperatures (600--800 /sup 0/C) were all of single phase NaCl (or Bl) structure with varying amounts of nitrogen deficiencies. Both the lattice parameter and T/sub c/ were found to be smoothly varying functions of composition and to correlate with deviations from stoichiometry of the molybdenum-rich samples. Ion implantation of nitrogen into several of the more nitrogen deficient films resulted in both the lattice parameter and the T/sub c/ moving toward the values expected for stoichiometric films of the same Mo content. Results of postdeposition plasma nitriding and thermal ammonia annealing are also discussed.

• Research Organization: Naval Research Laboratory, Washington, DC 20375-5000
• OSTI ID: 5564938
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 3:3; ISSN JVTAD
• Country of Publication: United States
• Language: English

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36 MATERIALS SCIENCE
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75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANNEALING
CARBON COMPOUNDS
CARBONITRIDES
CHEMICAL COMPOSITION
CHEMICAL REACTIONS
COHERENT SCATTERING
CRYSTAL LATTICES
CRYSTAL STRUCTURE
CUBIC LATTICES
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
FABRICATION
FCC LATTICES
FILMS
HEAT TREATMENTS
ION IMPLANTATION
LATTICE PARAMETERS
MOLYBDENUM COMPOUNDS
NIOBIUM COMPOUNDS
NITRIDATION
NITROGEN COMPOUNDS
PHYSICAL PROPERTIES
REFRACTORY METAL COMPOUNDS
SCATTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
X-RAY DIFFRACTION