Dissociative pumping of the alkanes using nonevaporable getters

Journal Article · Thu May 01 04:00:00 EDT 1986 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.573912· OSTI ID:5536130

Emerson, L C; Knize, R J; Cecchi, J L; Auciello, O

The pumping speed of a standard Zr--Al getter was measured over a temperature range of 110 to 640 /sup 0/C for the gaseous members of the alkane series (C/sub n/H/sub 2n/+2) extending from methane through n-butane. For a given member of the series, the pumping speed increases monotonically with temperature. The strength of the temperature dependencies decreases with increasing alkane mass. These data are in qualitative agreement with the predictions of a model which assumes that dissociation is the rate limiting process.

• Research Organization: Plasma Physics Laboratory, Princeton University, Princeton, New Jersey 08544
• DOE Contract Number: AC02-76CH03073
• OSTI ID: 5536130
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 4:3; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420700* -- Engineering-- Vacuum Engineering-- (-1987)
ALKANES
ALLOYS
ALUMINIUM ALLOYS
BUTANE
EQUIPMENT
GETTERING
GETTERS
HIGH TEMPERATURE
HYDROCARBONS
LABORATORY EQUIPMENT
MEDIUM TEMPERATURE
METHANE
ORGANIC COMPOUNDS
PUMPING
PUMPS
VACUUM PUMPS
VELOCITY
ZIRCONIUM ALLOYS