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Preparation and characteristic of Li/sub 14/Zn(GeO/sub 4/)/sub 4/ thin films for solid state batteries

Conference · · INTELEC, Int. Telecommun. Energy Conf. (Proc.); (United States)
OSTI ID:5529409
According to this study, lithium conductive solid electrolyte films are expected for all solid state lithium batteries. Li/sub 14/Zn (GeO/sub 4/)/sub 4/ (LISICON) phase thin films have been prepared by r.f. sputtering and vacuum evaporation method with electron beam heating. The sputtered film surface is considerably rougher than the evaporated film surface. The conductivities of both LISICON films at 500/sup 0/C are 5 x 10 /sup -3/ ..cap omega../sup -1/cm/sup -1/. The conductivity of the sputtered film is higher than that of the evaporated film below 500 /sup 0/C.
Research Organization:
Ibaraki Electrical Communication Laboratory, NTT. Tokai, Ibaraki-ken, 319-11
OSTI ID:
5529409
Report Number(s):
CONF-831010-
Conference Information:
Journal Name: INTELEC, Int. Telecommun. Energy Conf. (Proc.); (United States)
Country of Publication:
United States
Language:
English