Laser-induced interface reactions of copper thin films on sapphire substrates

Journal Article · Fri Sep 01 00:00:00 EDT 1989 · Journal of Materials Research; (USA)

DOI:https://doi.org/10.1557/JMR.1989.1202· OSTI ID:5487142

Godbole, M J; Pedraza, A J ^[1]; Lowndes, D H ^[2]; Kenik, E A ^[3]

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1. Department of Materials Science and Engineering, The University of Tennessee, Knoxville, Tennessee 37996-2200 (US)
2. Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6056
3. Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6376

The interface of a copper-sapphire couple that was irradiated with a nanosecond pulsed-excimer laser was studied by transmission electron microscopy. Deposited layers of 30 or 100 nm thickness were laser treated with energy densities in the range of 0.5 to 0.75 J/cm{sup 2}. Two different atmospheres were used during these treatments, viz., air or a mixture of argon-4 vol.% hydrogen. The copper film and a thin alumina layer were melted by the laser pulse. Two well differentiated regions could be observed in the modified layer. The region closer to the unmodified substrate consisted of epitaxially regrown alumina with crystallites misoriented up to 10{degree} relative to the substrate sapphire orientation, while precipitate particles could be seen closer to the resolidified copper. The nature of the precipitates generated in the second region was dependent on the atmosphere present during the treatment. In air a trirutile-like compound was obtained which is either oxygen or copper deficient. In an argon atmosphere a compound having a hexagonal structure closely related to sapphire was observed, where copper substituted for some aluminum. These observations are in agreement with a previously developed mathematical model that predicts melting of a thin substrate layer.

• DOE Contract Number: AC05-84OR21400
• OSTI ID: 5487142
• Journal Information: Journal of Materials Research; (USA), Journal Name: Journal of Materials Research; (USA) Vol. 4:5; ISSN JMREE; ISSN 0884-2914
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360102 -- Metals & Alloys-- Structure & Phase Studies
360106* -- Metals & Alloys-- Radiation Effects
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360206 -- Ceramics
Cermets
& Refractories-- Radiation Effects
AIR
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
ARGON
CHALCOGENIDES
CHEMICAL REACTIONS
COPPER
CORUNDUM
CRYSTAL STRUCTURE
DIMENSIONS
DISPERSIONS
ELECTROMAGNETIC RADIATION
ELECTRON MICROSCOPY
ELEMENTS
EXCIMER LASERS
FLUIDS
GAS LASERS
GASES
HYDROGEN
INTERFACES
LASER RADIATION
LASERS
MELTING
METALS
MICROSCOPY
MICROSTRUCTURE
MINERALS
MIXTURES
NONMETALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHYSICAL RADIATION EFFECTS
PULSES
RADIATION EFFECTS
RADIATIONS
RARE GASES
SAPPHIRE
THICKNESS
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY