Processing of La/sub 1. 8/Sr/sub 0. 2/CuO/sub 4/ and YBa/sub 2/Cu/sub 3/O/sub 7/ superconducting thin films by dual-ion-beam sputtering

Journal Article · Tue Mar 15 04:00:00 EST 1988 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.341106· OSTI ID:5484731

Madakson, P; Cuomo, J J; Yee, D S; Roy, R A; Scilla, G

High quality La/sub 1.8/Sr/sub 0.2/CuO/sub 4/ and YBa/sub 2/Cu/sub 3/O/sub 7/ superconducting thin films, with zero resistance at 88 K, have been made by dual-ion-beam sputtering of metal and oxide targets at elevated temperatures. The films are about 1.0 ..mu..m thick and are single phase after annealing. The substrates investigated are Nd-YAP, MgO, SrF/sub 2/, Si, CaF/sub 2/, ZrO/sub 2/-9% Y/sub 2/O/sub 3/, BaF/sub 2/, Al/sub 2/O/sub 3/, and SrTiO/sub 3/. Characterization of the films was carried out using Rutherford backscattering spectroscopy, resistivity measurements, transmission electron microscopy, x-ray diffraction, and secondary ion mass spectroscopy. Substrate/film interaction was observed in every case. This generally involves diffusion of the substrate into the film, which is accompanied by, for example, the replacement of Ba by Sr in the YBa/sub 2/Cu/sub 2/O/sub 7/ structure, in the case of SrTiO/sub 3/ substrate. The best substrates were those that did not significantly diffuse into the film and which did not react chemically with the film. In general, the superconducting transition temperature is found to depend on substrate temperature and ion beam energy, film composition, annealing conditions, and the nature and the magnitude of the substrate/film interaction.

• Research Organization: IBM, Thomas J. Watson Research Center, Yorktown Heights, New York 10598
• OSTI ID: 5484731
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 63:6; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
ALUMINIUM PHOSPHIDES
ANNEALING
BACKSCATTERING
BARIUM COMPOUNDS
BARIUM FLUORIDES
BARIUM OXIDES
CALCIUM COMPOUNDS
CALCIUM FLUORIDES
CALCIUM HALIDES
CHALCOGENIDES
CHEMICAL COMPOSITION
COATINGS
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
DATA
DEPOSITION
DIFFRACTION
DIMENSIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON MICROSCOPY
ELEMENTS
EXPERIMENTAL DATA
FABRICATION
FILMS
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
HEAT TREATMENTS
INFORMATION
LANTHANUM COMPOUNDS
LANTHANUM OXIDES
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MASS SPECTROSCOPY
METALS
MICROSCOPY
NEODYMIUM
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
RARE EARTH COMPOUNDS
RARE EARTHS
SCATTERING
SEMIMETALS
SILICON
SPECTROSCOPY
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM FLUORIDES
STRONTIUM OXIDES
SUBSTRATES
SUPERCONDUCTING FILMS
SURFACE COATING
THERMODYNAMIC PROPERTIES
THICKNESS
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
TRANSMISSION ELECTRON MICROSCOPY
VAPOR DEPOSITED COATINGS
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
YTTRIUM PHOSPHIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES