Optical properties of sputtered Si:H

Conference · Tue Dec 01 04:00:00 EST 1981

OSTI ID:5464948

Martin, P M; Pawlewicz, W T; Mann, I B

Sputtered Si:H is a very promising material for use in thin film solar cells, solar selective absorbers and optical coatings for the near infrared. Optical property - composition relationships have been determined for Si:H coatings having wide ranges of H content and Si-H bonding. The dependence of the optical absorption edge, optical band gas and refractive index at 2 ..mu..m wavelength on H content and Si-H bonding is described. Microstructural and topographical features of the films which influence their absorption and scattering characteristics are discussed. Composition and bonding diagrams used to select deposition conditions for the desired optical properties are also presented. Finally, multilayer Si:H/SiO/sub 2/ all-dielectric laser mirrors with reflectances greater than 99% at 1.315, 2.7 and 3.8 ..mu..m are described to illustrate the application of these coatings.

• Research Organization: Pacific Northwest Lab., Richland, WA (USA)
• DOE Contract Number: AC06-76RL01830
• OSTI ID: 5464948
• Report Number(s): PNL-SA-9858A; CONF-820107-5; ON: DE82007072
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
141000 -- Solar Collectors & Concentrators
ABSORPTIVITY
CHALCOGENIDES
CHEMICAL BONDS
CHEMICAL COMPOSITION
CRYSTAL STRUCTURE
ELEMENTS
ENERGY GAP
HYDROGEN
MICROSTRUCTURE
MIRRORS
NONMETALS
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
REFRACTIVITY
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON OXIDES
SPECTRAL REFLECTANCE
SPUTTERING