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Dependence of silicon carbide coating properties on deposition parameters: preliminary report

Technical Report ·
DOI:https://doi.org/10.2172/5461306· OSTI ID:5461306
Fuel particles for the High-Temperature Gas-Cooled Reactor (HTGR) contain a layer of pyrolytic silicon carbide, which acts as a pressure vessel and provides containment of metallic fission products. The silicon carbide (SiC) is deposited by the thermal decomposition of methyltrichlorosilane (CH/sub 3/SiCl/sub 3/ or MTS) in an excess of hydrogen. The purpose of the current study is to determine how the deposition variables affect the structure and properties of the SiC layer.
Research Organization:
Oak Ridge National Lab., TN (USA)
DOE Contract Number:
W-7405-ENG-26
OSTI ID:
5461306
Report Number(s):
ORNL/TM-7209
Country of Publication:
United States
Language:
English