Submicron silicon powder production in an aerosol reactor
Journal Article
·
· Appl. Phys. Lett.; (United States)
Powder synthesis by thermally induced vapor phase reactions is described. The powder generated by this technique consists of spherical, nonagglomerated particles of high purity. The particles are uniform in size, in the 0.1--0.2 ..mu..m size range. Most of the particles are crystalline spheres. A small fraction of the spheres are amorphous. Chain agglomerates account for less than 1% of the spherules.
- Research Organization:
- Division of Engineering and Applied Science, California Institute of Technology, Pasadena, California 91125
- OSTI ID:
- 5459339
- Journal Information:
- Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 49:2; ISSN APPLA
- Country of Publication:
- United States
- Language:
- English
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