Vertical scanning long trace profiler: A tool for metrology of X-ray mirrors

Conference · Tue Jul 01 04:00:00 EDT 1997

OSTI ID:544704

Li, Haizhang ^[1]; Takacs, P Z ^[2]; Oversluizen, T ^[3]

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1. Continental Optical Corp., Hauppauge, NY (United States)
2. Brookhaven National Lab., Upton, NY (United States)
3. Creative Instrumentation, Patchogue, NY (United States)

This paper describes the development of a prototype instrument of the Vertical Scanning Long Trace Profiler (VSLTP) under a SBIR Phase II grant from NASA. The instrument is capable of scanning shell mirrors with a diameter as small as 100mm for a travel distance of 700mm in vertical configuration. Main components of the optical system are described. It has a beam separation set, a beam splitting set, a Fourier transform lens system, a penta prism pair, a Risley prism pair and a cylinder lens. The main hardware and software for implementation of the prototype instrument are also presented. They include the major mechanical structure, 9-axis motion control system and the data acquisition and analysis software. The design of the optical and mechanical systems makes the VSLTP very tolerable to the deformation of the slide deformation, laser pattern shift and fluctuation due to temperature change. Results obtained from the Phase I show that VSLTP instrument is capable of a measurement accuracy of 50 nm for the height and 1 microradian for the slope.

• Research Organization: Brookhaven National Lab., Upton, NY (United States)
• Sponsoring Organization: National Aeronautics and Space Administration, Washington, DC (United States); USDOE Office of Energy Research, Washington, DC (United States)
• DOE Contract Number: AC02-76CH00016
• OSTI ID: 544704
• Report Number(s): BNL--64765; CONF-970706--; ON: DE98001147; CNN: Contract NAS8-40642
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
INTERFEROMETRY
MEASURING INSTRUMENTS
MIRRORS
X RADIATION