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Title: Compact sources in Japan and their intended applications (invited)

Journal Article · · Review of Scientific Instruments; (United States)
DOI:https://doi.org/10.1063/1.1142646· OSTI ID:5412030
 [1]
  1. Electrotechnical Laboratory, Umezono, Tsukuba, Ibaraki 305 (Japan)

In these ten years, thirteen compact sources whose electron energy is not higher than 1 GeV have been constructed in Japan. Five sources have been developed by Electrotechnical Laboratory jointly with Sumitomo Electric Industries, Ltd. and Kawasaki Heavy Industries, Ltd. It is worth mentioning that the operations of ten rings (NIJI-II, III, IV, NAR, SuperALIS, SORTEC, AURORA, LUNA, JSR, HITACHI) have started since 1988. Recent status of these sources and their intended applications including visible and ultraviolet free electron laser projects using insertion devices installed in TERAS and NIJI-IV are briefly reported and key technologies needed to realize compact sources for ultralarge scale integration lithography and angiography, such as the electron undulating method and long lived, high-current beam storage at the early stage of commissioning, are discussed.

OSTI ID:
5412030
Journal Information:
Review of Scientific Instruments; (United States), Vol. 63:1; ISSN 0034-6748
Country of Publication:
United States
Language:
English

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