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Title: A 2-m grazing incidence monochromator with a silicon-carbide-based master grating for undulator radiation

Journal Article · · Review of Scientific Instruments; (United States)
DOI:https://doi.org/10.1063/1.1143053· OSTI ID:5408773
 [1]; ;  [2];  [3]
  1. NTT Interdisciplinary Research Laboratories, Musashino, Tokyo 180 (Japan)
  2. Photon Factory, National Laboratory for High Energy Physics, Tsukuba, Ibaraki 305 (Japan)
  3. Central Research Laboratory, Hitachi Ltd., Kokubunji, Tokyo 185 (Japan)

Performance of a 2-m grazing incidence vacuum ultraviolet (VUV)/soft x-ray monochromator was evaluated with silicon-carbide-based master grating of 1200 lines/mm groove density that was newly developed for use of undulator radiation. Incident power density on the grating surface was as high as 120 mW/mm{sup 2}. Surface observation of the grating after the test operation showed that the periodic structure and reflective surface of the grooves were well preserved, except for slight degradation of the groove edges, even though no active cooling system was equipped. Photon flux was of the order of 10{sup 12} photons/s. Efficiency of second-order diffraction relative to the first-order diffraction was 20%--50%. Resolving power of 2200 was achieved at 244.4 eV for 5-{mu}m exit slit width.

OSTI ID:
5408773
Journal Information:
Review of Scientific Instruments; (United States), Vol. 63:1; ISSN 0034-6748
Country of Publication:
United States
Language:
English