Ignition characteristics and temperature measurements for silane/N/sub 2/-air opposed jet diffusion flames

Journal Article · Tue Jul 01 00:00:00 EDT 1986 · Combust. Flame; (United States)

DOI:https://doi.org/10.1016/0010-2180(86)90079-9· OSTI ID:5397483

Koda, S; Fujiwara, O; Ohnishi, T

The properties of chain ignition of silane (SiH/sub 4/) gas have been studied under reduced pressures by several previous researchers, but the flame properties at ordinary pressures seem to be very rarely studied in spite of the fact that this gas is now widely used in semiconductor manufacture. Very recently other researchers reported a counterflow diffusion flame technique applied to studying the SiO/sub x/ formation from silane in the flame of H/sub 2//O/sub 2/, but the properties of self sustaining flames of silane itself with air are not made clear.

• Research Organization: Dept. of Reaction Chemistry, Faculty of Engineering, The Univ. of Tokyo, Tokyo
• OSTI ID: 5397483
• Journal Information: Combust. Flame; (United States), Journal Name: Combust. Flame; (United States) Vol. 65:1; ISSN CBFMA
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
400800* -- Combustion
Pyrolysis
& High-Temperature Chemistry
AIR
AMBIENT TEMPERATURE
CHEMICAL REACTION KINETICS
COMBUSTION KINETICS
DIFFUSION
ELEMENTS
FLAME PROPAGATION
FLAMES
FLUIDS
GASES
HYDRIDES
HYDROGEN
HYDROGEN COMPOUNDS
IGNITION
IGNITION QUALITY
JETS
KINETICS
MATERIALS
MIXING
NITROGEN
NONMETALS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
OXYGEN
PRESSURE EFFECTS
REACTION KINETICS
SEMICONDUCTOR MATERIALS
SILANES
SILICON COMPOUNDS
TEMPERATURE MEASUREMENT