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U.S. Department of Energy
Office of Scientific and Technical Information

Method for palladium activating molybdenum metallized features on a ceramic substrate

Patent ·
OSTI ID:5385281

A molybdenum or tungsten metallurgical pattern is formed on or in a dielectric green sheet. Palladium, nickel, platinum or rhodium is coated on a layer of polyvinyl butyral which is carried on a polyester film. The metal layer of this assembly is laminated to a dielectric green sheet which carries the molybdenum or tungsten metallurgy. The polyester film is stripped off. The resulting assembly is sintered to a fired structure, whereby the polyvinyl butyral is volatilized off and the palladium, nickel, platinum or rhodium is alloyed with the molybdenum or tungsten metallurgy to provide a densified metallurgy whose surface is free of glass.

Assignee:
International Business Machines Corporation
Patent Number(s):
US 4510000
OSTI ID:
5385281
Country of Publication:
United States
Language:
English