Radiation degradation of methyl. cap alpha. -chloroacrylate-methacrylonitrile copolymers. [Gamma rays]
- Univ. of Alabama, University
The radiation degradation behavior of methyl ..cap alpha..-chloroacrylate (MCA) and methacrylonitrile (MCN) copolymers has been investigated as part of a program to develop high-sensitivity polymeric resists for integrated circuit manufacture. High-molecular-weight copolymers were prepared by emulsion techniques. Several different copolymer compositions were prepared varying from 19 to 68 mol % MCA. These copolymers were fractionated and then subjected to ..gamma.. irradiation from a /sup 60/Co source. The G/sub s/ - G/sub x/, G/sub s/ - 4G/sub x/ values were determined from anti M/sub n//sup -1/ and anti M/sub w//sup -1/ versus dose plots, and the G/sub s/ and G/sub x/ values were then calculated. Molecular weights of both unirradiated and irradiated polymers were analyzed by membrane osmometry and gel permeation chromatography. All copolymers exhibited higher degradation susceptibilities than that of poly(methyl methacrylate), which has G/sub s/ = 1.3. The individual G/sub s/ and G/sub x/ values of the copolymers were found to fall between those of the two homopolymers, poly(methyl ..cap alpha..-chloracrylate) (G/sub s/ = 6.0) and polymethacrylonitrile (G/sub s/ = 3.1). The dependence of G/sub s/ and G/sub x/ values on molecular weight was minor. The crosslinking susceptibility of the poly(methyl ..cap alpha..-chloroacrylate) (G/sub x/ = 0.8) was greatly decreased by copolymerization with MCN. Relatively small amounts of MCN caused alarge drop in G/sub x/, i.e., G/sub x/ = 0.15 at 32% MCN and G/sub x/ = 0.03 at 51% MCN. The observation could be attributed to the decreasing probability that crosslinking sites, in the MCA monomer units on adjacent chains, would lie in close proximity. 3 figures, 8 tables.
- OSTI ID:
- 5345463
- Journal Information:
- J. Polym. Sci., Polym. Chem. Ed.; (United States), Journal Name: J. Polym. Sci., Polym. Chem. Ed.; (United States) Vol. 18:1; ISSN JPLCA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360406* -- Materials-- Polymers & Plastics-- Radiation Effects-- (-1987)
ACRYLIC ACID ESTERS
ACTIVATION ENERGY
BETA DECAY RADIOISOTOPES
BETA-MINUS DECAY RADIOISOTOPES
CARBOXYLIC ACID ESTERS
CHEMICAL RADIATION EFFECTS
CHEMICAL REACTIONS
CHEMISTRY
CHLORINE
CHROMATOGRAPHY
COBALT 60
COBALT ISOTOPES
COPOLYMERS
CROSS-LINKING
DECOMPOSITION
ELECTROMAGNETIC RADIATION
ELEMENTS
ENERGY
ESTERS
G VALUE
GAMMA RADIATION
HALOGENS
INTERMEDIATE MASS NUCLEI
INTERNAL CONVERSION RADIOISOTOPES
IONIZING RADIATIONS
IRRADIATION
ISOMERIC TRANSITION ISOTOPES
ISOTOPES
MANUFACTURING
MINUTES LIVING RADIOISOTOPES
MOLECULAR WEIGHT
NITRILES
NONMETALS
NUCLEI
ODD-ODD NUCLEI
ORGANIC COMPOUNDS
ORGANIC NITROGEN COMPOUNDS
ORGANIC POLYMERS
POLYMERIZATION
POLYMERS
RADIATION CHEMISTRY
RADIATION EFFECTS
RADIATIONS
RADIOISOTOPES
RADIOLYSIS
SEPARATION PROCESSES
YEARS LIVING RADIOISOTOPES