Study of atomic excitations in sputtering with the use of Mg, Al, Ca, and Cd targets

Journal Article · Tue Nov 01 04:00:00 EST 1983 · Phys. Rev. B: Condens. Matter; (United States)

DOI:https://doi.org/10.1103/PhysRevB.28.5029· OSTI ID:5337103

Veje, E

Solid targets of Mg, Al, Ca, and Cd have been bombarded with 80-keV Ar/sup +/ ions. Photon emission from sputtered particles has been measured and converted to relative level populations. The experimental results are discussed in terms of a set of basic considerations outlined for atomic excitations in sputtering processes.

• Research Organization: Physics Laboratory II, H.C. Orsted Institute, Universitetsparken 5, DK-2100 Copenhagen, Denmark
• OSTI ID: 5337103
• Journal Information: Phys. Rev. B: Condens. Matter; (United States), Journal Name: Phys. Rev. B: Condens. Matter; (United States) Vol. 28:9; ISSN PRBMD
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALKALINE EARTH METALS
ALUMINIUM
ARGON IONS
CADMIUM
CALCIUM
CHARGED PARTICLES
COLLISIONS
ELEMENTS
EMISSION
ENERGY RANGE
ENERGY-LEVEL TRANSITIONS
EXCITATION
IONS
KEV RANGE
KEV RANGE 10-100
MAGNESIUM
METALS
PHOTON EMISSION
SPUTTERING