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Title: SXLS Phase 2 vacuum system

Conference ·
OSTI ID:5335137

Phase 1 of the SXLS (Superconducting X-Ray Lithography Source) is described. It is a room temperature, racetrack-shaped electron storage ring, 8.5 meters in circumference. The Phase 2 design consists of replacing the two room temperature 180{degree} dipole magnets of Phase 1 with superconducting magnets. However, even though superconducting magnets are used, the vacuum chambers within them will operate at room temperature. The chambers are constructed as weldments and are made of INCONEL-625. They are bakeable to 150{degrees}C in-situ and incorporate nine photon beam ports. Each have built-in distributed sputter-ion pumps (DIP), non-evaporable getter (NEG) pumps, beam position monitors, and ion clearing electrodes. R D is underway to optimize the DIP, which much operate at 3.86 Tesla, and to develop a low photo yield coating or treatment for the internal surfaces of the chambers.

Research Organization:
Brookhaven National Lab., Upton, NY (United States)
Sponsoring Organization:
USDOE; USDOE, Washington, DC (United States)
DOE Contract Number:
AC02-76CH00016
OSTI ID:
5335137
Report Number(s):
BNL-46469; CONF-910505-393; ON: DE91016993
Resource Relation:
Conference: 1991 Institute of Electrical and Electronics Engineers (IEEE) particle accelerator conference (PAC), San Francisco, CA (United States), 6-9 May 1991
Country of Publication:
United States
Language:
English