SXLS Phase 2 vacuum system
Phase 1 of the SXLS (Superconducting X-Ray Lithography Source) is described. It is a room temperature, racetrack-shaped electron storage ring, 8.5 meters in circumference. The Phase 2 design consists of replacing the two room temperature 180{degree} dipole magnets of Phase 1 with superconducting magnets. However, even though superconducting magnets are used, the vacuum chambers within them will operate at room temperature. The chambers are constructed as weldments and are made of INCONEL-625. They are bakeable to 150{degrees}C in-situ and incorporate nine photon beam ports. Each have built-in distributed sputter-ion pumps (DIP), non-evaporable getter (NEG) pumps, beam position monitors, and ion clearing electrodes. R D is underway to optimize the DIP, which much operate at 3.86 Tesla, and to develop a low photo yield coating or treatment for the internal surfaces of the chambers.
- Research Organization:
- Brookhaven National Lab., Upton, NY (United States)
- Sponsoring Organization:
- USDOE; USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC02-76CH00016
- OSTI ID:
- 5335137
- Report Number(s):
- BNL-46469; CONF-910505-393; ON: DE91016993
- Resource Relation:
- Conference: 1991 Institute of Electrical and Electronics Engineers (IEEE) particle accelerator conference (PAC), San Francisco, CA (United States), 6-9 May 1991
- Country of Publication:
- United States
- Language:
- English
Similar Records
Performance of the Phase 1 superconducting x-ray lithography source (SXLS) at BNL
Performance of the Phase 1 superconducting x-ray lithography source (SXLS) at BNL
Related Subjects
VACUUM SYSTEMS
DESIGN
BEAM BENDING MAGNETS
ELECTRON RINGS
GETTERS
INCONEL 625
SPUTTER-ION PUMPS
STORAGE RINGS
SUPERCONDUCTING MAGNETS
X-RAY SOURCES
ALLOY-NI61CR22MO9NB4FE3
ALLOYS
ALUMINIUM ADDITIONS
ALUMINIUM ALLOYS
CHROMIUM ALLOYS
CORROSION RESISTANT ALLOYS
ELECTRICAL EQUIPMENT
ELECTROMAGNETS
EQUIPMENT
HEAT RESISTANT MATERIALS
HEAT RESISTING ALLOYS
INCONEL ALLOYS
IRON ALLOYS
LABORATORY EQUIPMENT
MAGNETS
MATERIALS
MOLYBDENUM ALLOYS
NICKEL ALLOYS
NICKEL BASE ALLOYS
NIOBIUM AL
PUMPS
RADIATION SOURCES
SUPERCONDUCTING DEVICES
VACUUM PUMPS
X-RAY EQUIPMENT
430303* - Particle Accelerators- Experimental Facilities & Equipment
430400 - Particle Accelerators- Storage Rings