Silent discharge type pulse laser device

Patent · Tue Apr 09 04:00:00 EST 1985

OSTI ID:5318849

Yagi, S; Kuzumoto, M; Ogawa, S; Tanaka, M

A silent discharge type pulse laser device having a pair of opposing electrodes, at least one of which is an electrode covered by a dielectric, which is mounted opposite to a metallic electrode with a silent discharge space in between, a laser resonator consisting of a total reflection mirror and a partial reflection mirror mounted opposite to each other with the silent discharge section in between, a source of high frequency voltage for supplying to the pair of electrodes a high frequency voltage having a predetermined period for silent discharge, and a controller for controlling the high frequency voltage from the source with respect to a first interval and a second interval that form a period longer than the period for silent discharge. The high frequency voltage is supplied to the silent discharge section at a first peak voltage value during the first interval and at a second peak voltage value during the second interval, wherein the second peak voltage value is sufficient to cause a discharge but insufficient to excite laser oscillation.

• Assignee: Mitsubishi Denki Kabushiki Kaisha (Japan)
• Patent Number(s): US 4510606
• OSTI ID: 5318849
• Country of Publication: United States
• Language: English

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