Synthetic infrared spectra

Journal Article · Tue Jul 01 00:00:00 EDT 1997 · Optics Letters

DOI:https://doi.org/10.1364/OL.22.001036· OSTI ID:531761

Sinclair, M B; Butler, M A; Kravitz, S H; Zubrzycki, W J; Ricco, A J ^[1]

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1. Sandia National Laboratories, Albuquerque, New Mexico 87185-1405 (United States)

We have designed, microfabricated, and characterized a diffractive optical element that reproduces the infrared spectrum of HF from 3600 to 4300cm{sup -1} .The reflection-mode diffractive optic consists of 4096 lines, each 4.5{mu}m wide, at 16 discrete depths relative to the substrate from 0 to 1.2{mu}m and was fabricated upon a silicon wafer by anisotropic reactive ion-beam etching in a four-mask-level process. We envisage the use of diffractive optical elements of this type as the basis for a new class of miniaturized, remote chemical sensor systems based on correlation spectroscopy. {copyright} {ital 1997} {ital Optical Society of America}

• Research Organization: Sandia National Laboratory
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 531761
• Journal Information: Optics Letters, Journal Name: Optics Letters Journal Issue: 13 Vol. 22; ISSN 0146-9592; ISSN OPLEDP
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
CHEMICAL ANALYSIS
DESIGN
DIFFRACTION GRATINGS
ETCHING
HYDROFLUORIC ACID
INFRARED SPECTRA
ION BEAMS
REMOTE SENSING
SILICON
SYNTHESIS