Application of matrix isolation spectroscopy to the measurement of sputtering yields

Journal Article · Thu Mar 01 04:00:00 EST 1979 · J. Vac. Sci. Technol.; (United States)

DOI:https://doi.org/10.1116/1.569921· OSTI ID:5310331

Steinbruechel, C; Gruen, D M; Dawson, J

Matrix isolation spectroscopy has been used to measure sputtering yields of D+ and Ar+ on Au and Ti in the energy range 0.25 to 2.0 keV. The technique involves bombarding a target with ions produced by a sputter ion gun, collecting sputtered atoms in a cryogenic noble gas matrix, and determining the amount of metal collected by optical spectroscopy. The present preliminary results are compared with previous results obtained by more conventional experimental techniques.

• Research Organization: Argonne National Lab., IL
• OSTI ID: 5310331
• Journal Information: J. Vac. Sci. Technol.; (United States), Journal Name: J. Vac. Sci. Technol.; (United States) Vol. 16:2; ISSN JVSTA
• Country of Publication: United States
• Language: English

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ARGON
CONTAINERS
CRYOGENICS
DESIGN
DEUTERIUM
DEWARS
ELEMENTS
GOLD
HYDROGEN ISOTOPES
ISOTOPES
LIGHT NUCLEI
MATRIX ISOLATION
MEASURING INSTRUMENTS
METALS
NONMETALS
NUCLEI
ODD-ODD NUCLEI
RARE GASES
SPECTROSCOPY
SPUTTERING
STABLE ISOTOPES
THERMONUCLEAR REACTOR MATERIALS
TITANIUM
TRANSITION ELEMENTS
VACUUM SYSTEMS