Absorption of SF{sub 6}, SF{sub 4}, SOF{sub 2}, and SO{sub 2}F{sub 2} in the 115--220 nm region
Conference
·
OSTI ID:529644
- Univ. Paul Sabatier, Toulouse (France)
Absorption coefficients k{sub 0} (m{sup {minus}1}.100 kPa{sup {minus}1}) of SF{sub 6} and of its main gaseous by-products SF{sub 4}, SOF{sub 2} and SO{sub 2}F{sub 2} were measured i the 115--220 nm region. The experiments were carried out at a temperature of 298 K and a spectral resolution of 0.1 nm over the wavelength range 115--118 nm for SF{sub 6}, 115--220 nm for SF{sub 4}, 120--195 nm for SOF{sub 2} and 120--210 nm for SO{sub 2}F{sub 2}. The highest absorption coefficient values were obtained for SF{sub 4} and the lowest for SF{sub 6}.
- OSTI ID:
- 529644
- Report Number(s):
- CONF-960614--; ISBN 0-7803-3531-7
- Country of Publication:
- United States
- Language:
- English
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